Wafer Scale Integration

Format: Hardcover

Language: English

Format: PDF / Kindle / ePub

Size: 11.83 MB

Downloadable formats: PDF

What they saw was a sliver of germanium, with protruding wires, glued to a glass slide. However, for the investigation of optomechanical circuits with typical waveguide lengths on the order of a few hundred microns, the residual propagation loss can easily be tolerated. Wafer is placed in a high temperature, furnace (of about 100o C) At first a thin layer of silicon diode SiO2 layer is made at particular areas of N-type layer which are subject to diffusion.

Pages: 503

Publisher: Springer; 1989 edition (March 31, 1989)

ISBN: 0792390032

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